Course Information
Course Title: An Introduction to Helium Ion Microscopy and its Analytical Capabilities - NEW COURSE!
Categories: 1 - Imaging
2 - Mass Spectrometry
3 - Microscopy
4 - Surface Analysis
Instructor(s): John Notte Course Number: 132
Affiliation: Carl Zeiss, SMT
Course Date: 03/13/2009 - Friday Course Length: 1/2 Day Course
Start Time: 08:30 AM End Time: 12:30 PM
Fee: $215 ($315 after 2/9/09) Textbook Fee:

Course Description
This course will introduce the attendee to the imaging and analytical capabilities of the helium ion microscope. This newly developed technology offers sub-nanometer resolution with contract mechanisms that are complementary to the tranditional SEM and gallium FIB. Most recently the backscattered helium has been used to ascertain the mass of the scattering nuclei comprising the specimen. Throughout the course, the comparison will be made with the complementary techniques of the SEM and Gallium FIB. The following topics will be covered: Probe Formation (including the gas field ionization source and the ion optical column), Sample Interaction (surface specific phenomena, penetration depth, generated particles), Generated Particles (secondary electrons, backscattered helium, recoiled atoms, photons), Detectors and Imaging (microchannel plate, Everhart-Thornley detectors), Contrast Mechanisms (material composition, crystallography, topography, optical properties, electrical properties), and Specific Applications (sub -nanometer imaging, elemental identification, material patterning).

Target Audience
Technicians, Scientists, Engineers

Course Outline
1. Probe Formation (including the gas field ionization source and the ion optical column)
2. Sample Interaction (surface specific phenomena, penetration depth, generated particles)
3. Generated Particles (secondary electrons, backscattered helium, recoiled atoms, photons)
4. Detectors and Imaging (microchannel plate, Everhart-Thornley detectors)
5. Contrast Mechanisms (material composition, crystallography, topography, optical properties, electrical properties)

Course Instructor's Biography
Dr. John Notte is an expert in charged particle microscopes (SEMs and FIBs) and has worked on their development for over 15 years with companies that include AMRAY, KLA-Tencor, FEI, ALIS, and Carl Zeiss. Over the past several years, John has played an important role in the development of the ORION microscope and its recent commercial success. He has given numerous talks on helium ion microscopy around the globe to experts and non-experts alike in the field of microscopy. In his prior career as a teacher, John received awards and recognition for his teaching at U.C. Berkeley and Bates College. John participates in the touring speakers program within the Microbeam Analysis Society.